On the mechanism of nitrogenated carbon film deposition by PACVD in the presence of nitrogen: A cryo-trapping assisted mass spectrometric study

by Francisco L. Tabares, David Tafalla, Jose Antonio Ferreira
Reference:
On the mechanism of nitrogenated carbon film deposition by PACVD in the presence of nitrogen: A cryo-trapping assisted mass spectrometric study (Francisco L. Tabares, David Tafalla, Jose Antonio Ferreira), In CHEMICAL VAPOR DEPOSITION, volume 13, 2007.
Bibtex Entry:
@article{ ISI:000248381800010,
Author = {Tabares, Francisco L. and Tafalla, David and Antonio Ferreira, Jose},
Title = {{On the mechanism of nitrogenated carbon film deposition by PACVD in the
   presence of nitrogen: A cryo-trapping assisted mass spectrometric study}},
Journal = {{CHEMICAL VAPOR DEPOSITION}},
Year = {{2007}},
Volume = {{13}},
Number = {{6-7}},
Pages = {{335-344}},
Month = {{JUL}},
DOI = {{10.1002/cvde.200606556}},
ISSN = {{0948-1907}},
ResearcherID-Numbers = {{Tafalla, David/C-3925-2017
   }},
ORCID-Numbers = {{Tafalla, David/0000-0001-5669-1419
   Tabares, Francisco/0000-0001-7045-8672}},
Unique-ID = {{ISI:000248381800010}},
}

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