Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure

by J. A. Ferreira, F. L. Tabares, D. Tafalla
Reference:
Removal of carbon deposits in narrow gaps by oxygen plasmas at low pressure (J. A. Ferreira, F. L. Tabares, D. Tafalla), In JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, volume 25, 2007.
Bibtex Entry:
@article{ ISI:000248491700017,
Author = {Ferreira, J. A. and Tabares, F. L. and Tafalla, D.},
Title = {{Removal of carbon deposits in narrow gaps by oxygen plasmas at low
   pressure}},
Journal = {{JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}},
Year = {{2007}},
Volume = {{25}},
Number = {{4}},
Pages = {{746-750}},
Month = {{JUL-AUG}},
DOI = {{10.1116/1.2746046}},
ISSN = {{0734-2101}},
ResearcherID-Numbers = {{Tafalla, David/C-3925-2017}},
ORCID-Numbers = {{Tafalla, David/0000-0001-5669-1419}},
Unique-ID = {{ISI:000248491700017}},
}

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