by F. L. Tabares, J. A. Ferreira, D. Tafalla, I. Tanarro, V. J. Herrero, I. Mendez, C. Gomez-Aleixandre, J. M. Albella
Reference:
Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters (F. L. Tabares, J. A. Ferreira, D. Tafalla, I. Tanarro, V. J. Herrero, I. Mendez, C. Gomez-Aleixandre, J. M. Albella), In PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY (LSO Johansson, JN Andersen, M Gothelid, U Helmersson, L Montelius, M Rubel, J Setina, LE Wernersson, eds.), volume 100, 2008. (17th International Vacuum Congress/13th International Conference on Surface Science/International Conference on Nanoscience and Technology, Stockholm, SWEDEN, JUL 02-06, 2007)
Bibtex Entry:
@inproceedings{ ISI:000275655200221,
Author = {Tabares, F. L. and Ferreira, J. A. and Tafalla, D. and Tanarro, I. and
Herrero, V. J. and Mendez, I. and Gomez-Aleixandre, C. and Albella, J.
M.},
Editor = {{Johansson, LSO and Andersen, JN and Gothelid, M and Helmersson, U and Montelius, L and Rubel, M and Setina, J and Wernersson, LE}},
Title = {{Cleaning efficiency of carbon films by oxygen plasmas in the presence of
metallic getters}},
Booktitle = {{PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL
CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE
AND TECHNOLOGY}},
Series = {{Journal of Physics Conference Series}},
Year = {{2008}},
Volume = {{100}},
Note = {{17th International Vacuum Congress/13th International Conference on
Surface Science/International Conference on Nanoscience and Technology,
Stockholm, SWEDEN, JUL 02-06, 2007}},
Organization = {{Swedish Vacuum Soc}},
DOI = {{10.1088/1742-6596/100/6/062025}},
Article-Number = {{UNSP 062025}},
ISSN = {{1742-6588}},
ResearcherID-Numbers = {{Herrero, Victor/G-1369-2016
Tafalla, David/C-3925-2017
}},
ORCID-Numbers = {{Tafalla, David/0000-0001-5669-1419
Tabares, Francisco/0000-0001-7045-8672}},
Unique-ID = {{ISI:000275655200221}},
}