Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters

by F. L. Tabares, J. A. Ferreira, D. Tafalla, I. Tanarro, V. J. Herrero, I. Mendez, C. Gomez-Aleixandre, J. M. Albella
Reference:
Cleaning efficiency of carbon films by oxygen plasmas in the presence of metallic getters (F. L. Tabares, J. A. Ferreira, D. Tafalla, I. Tanarro, V. J. Herrero, I. Mendez, C. Gomez-Aleixandre, J. M. Albella), In PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY (LSO Johansson, JN Andersen, M Gothelid, U Helmersson, L Montelius, M Rubel, J Setina, LE Wernersson, eds.), volume 100, 2008. (17th International Vacuum Congress/13th International Conference on Surface Science/International Conference on Nanoscience and Technology, Stockholm, SWEDEN, JUL 02-06, 2007)
Bibtex Entry:
@inproceedings{ ISI:000275655200221,
Author = {Tabares, F. L. and Ferreira, J. A. and Tafalla, D. and Tanarro, I. and
   Herrero, V. J. and Mendez, I. and Gomez-Aleixandre, C. and Albella, J.
   M.},
Editor = {{Johansson, LSO and Andersen, JN and Gothelid, M and Helmersson, U and Montelius, L and Rubel, M and Setina, J and Wernersson, LE}},
Title = {{Cleaning efficiency of carbon films by oxygen plasmas in the presence of
   metallic getters}},
Booktitle = {{PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL
   CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE
   AND TECHNOLOGY}},
Series = {{Journal of Physics Conference Series}},
Year = {{2008}},
Volume = {{100}},
Note = {{17th International Vacuum Congress/13th International Conference on
   Surface Science/International Conference on Nanoscience and Technology,
   Stockholm, SWEDEN, JUL 02-06, 2007}},
Organization = {{Swedish Vacuum Soc}},
DOI = {{10.1088/1742-6596/100/6/062025}},
Article-Number = {{UNSP 062025}},
ISSN = {{1742-6588}},
ResearcherID-Numbers = {{Herrero, Victor/G-1369-2016
   Tafalla, David/C-3925-2017
   }},
ORCID-Numbers = {{Tafalla, David/0000-0001-5669-1419
   Tabares, Francisco/0000-0001-7045-8672}},
Unique-ID = {{ISI:000275655200221}},
}

This entry was posted by . Bookmark the permalink.