Studies of the removal of hydrogenated carbon films by nitrogen glow discharges

by J. A. Ferreira, F. L. Tabares
Reference:
Studies of the removal of hydrogenated carbon films by nitrogen glow discharges (J. A. Ferreira, F. L. Tabares), In PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY (LSO Johansson, JN Andersen, M Gothelid, U Helmersson, L Montelius, M Rubel, J Setina, LE Wernersson, eds.), volume 100, 2008. (17th International Vacuum Congress/13th International Conference on Surface Science/Internatinal Conference on Nanoscience and Technology, Stockholm, SWEDEN, JUL 02-06, 2007)
Bibtex Entry:
@inproceedings{ ISI:000275655200222,
Author = {Ferreira, J. A. and Tabares, F. L.},
Editor = {{Johansson, LSO and Andersen, JN and Gothelid, M and Helmersson, U and Montelius, L and Rubel, M and Setina, J and Wernersson, LE}},
Title = {{Studies of the removal of hydrogenated carbon films by nitrogen glow
   discharges}},
Booktitle = {{PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL
   CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE
   AND TECHNOLOGY}},
Series = {{Journal of Physics Conference Series}},
Year = {{2008}},
Volume = {{100}},
Note = {{17th International Vacuum Congress/13th International Conference on
   Surface Science/Internatinal Conference on Nanoscience and Technology,
   Stockholm, SWEDEN, JUL 02-06, 2007}},
Organization = {{Swedish Vacuum Soc}},
DOI = {{10.1088/1742-6596/100/6/062026}},
Article-Number = {{062026}},
ISSN = {{1742-6588}},
ORCID-Numbers = {{Tabares, Francisco/0000-0001-7045-8672}},
Unique-ID = {{ISI:000275655200222}},
}

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