Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma

by E. M. Hollmann, D. Alegre, M. J. Baldwin, C. P. Chrobak, R. P. Doerner, M. Miyamoto, D. Nishijima
Reference:
Measurement of sputtered beryllium yield and angular distribution during nanostructure growth in a helium plasma (E. M. Hollmann, D. Alegre, M. J. Baldwin, C. P. Chrobak, R. P. Doerner, M. Miyamoto, D. Nishijima), In JOURNAL OF APPLIED PHYSICS, volume 122, 2017.
Bibtex Entry:
@article{ ISI:000411459800008,
Author = {Hollmann, E. M. and Alegre, D. and Baldwin, M. J. and Chrobak, C. P. and
   Doerner, R. P. and Miyamoto, M. and Nishijima, D.},
Title = {{Measurement of sputtered beryllium yield and angular distribution during
   nanostructure growth in a helium plasma}},
Journal = {{JOURNAL OF APPLIED PHYSICS}},
Year = {{2017}},
Volume = {{122}},
Number = {{11}},
Month = {{SEP 21}},
DOI = {{10.1063/1.5002114}},
Article-Number = {{113301}},
ISSN = {{0021-8979}},
EISSN = {{1089-7550}},
ORCID-Numbers = {{Alegre Castro, Daniel/0000-0002-1665-7811}},
Unique-ID = {{ISI:000411459800008}},
}

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